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To move closer squeed over1/23/2024 ![]() Many MEMS accelerometers measure the displacement of a microstructure separated from a substrate by a thin gap. The Reynolds equation assumes that the fluid film thickness is small compared to the other dimensions of the device. This partial differential equation focuses on the relationship between lubricant pressure and its dependence on the thickness of the flow film, the local fluid velocity, and the velocity of the surfaces. ![]() The Reynolds equation can be used to analyze the fluid dynamics of thin films of gases or liquids between two moving surfaces. While film damping can be an unwanted occurrence, it can also be used as a mechanism for controlling the transient operation of a component. In general, the motion of the structure can result in a mixture of both squeeze and slide film damping, but in practical devices it is often the case that one process dominates.īy dissipating energy from the moving structures, the film results in a damping effect in both instances. In slide film damping, the released structure moves parallel to the substrate, leading to shearing within the gas film. When the gap contracts, the gas film is squeezed between the two surfaces. In squeezed film damping, the released structure moves so that the gap between it and the substrate expands and/or contracts. When the released structure moves, flow occurs in the thin layer of gas and the resulting energy dissipation produces damping. ![]() Fluid Flow, Heat Transfer, and Mass Transport Fluid Flow: Conservation of Momentum, Mass, and Energy Squeezed and Sliding Films Squeezed and Sliding Films Cause Dampingįilm damping often occurs in microsystems when a released (or freely moving) structure is separated from the substrate (a larger structure that is stationary) by a thin layer of gas.
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